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DC magnetron sputtering (1)
reactive sputtering (1)
thin film (1)
Titanium aluminium nitride (1)
ฟิล์มบาง (1)
รีแอคทีฟ สปัตเตอริง (1)
สาขาวิทยาศาสตร์กายภาพและคณิตศาสตร์ (1)
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